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STC P - 2010 Annual Report

The Scientific Technical Committee Precision Engineering and Metrology (STC P) had two meetings in 2010 - in Paris on January 21st and in Pisa on August 27th. The STC P meetings were attended by 61 participants in Paris and 65 participants in Pisa.

Details of the technical presentations and discussions at the 2010 STC P meetings can be found in the complete minutes of these meetings, produced by W. Gao, STC P Secretary. The minutes are available to CIRP members at the CIRP website.

This year’s keynote paper of STC P entitled “Precision Engineering for Astronomy and Gravity Science” was very well presented by P. Shore during the main session of the General Assembly in Pisa. P. Shore coordinated this excellent paper together with C. Cunningham, D. DeBra, C. Evans, J. Hough, R. Gilmozzi, H. Kunzmann, P. Morantz, X. Tonnellier. The paper was well received by the assembly.

Following the keynote paper, the STC P paper session was held on August 23rd and 24th. One special focus were new developments of probes for micrometrology. This topic, which has been one special interested of the members of STC P in the last years, was presented in these presentations: “New Concept of a 3D- Probing System for Micro components” (T. Liebrich, W. Knapp), “A High-Resolution, Self-Sensing and Self-Actuated Probe for Micro- and Nano Coordinate Metrology and Scanning Force Microscopy” (K. Hideka, H.-U. Danzebrink, H. Illers, A Saito, N. Ishikawa/ P.H.J. Schellekens), “A Novel Resist Surface Profilometer for Next-generation Photolithography using Mechano-Optical Arrayed Probe System” (S. Takahashi, K. Watanabe, K. Takamasu / T. Masuzawa) and “A Newly Developed Three-Dimensional Profile Scanner with Nanometer Spatial Resolution” (H. Shinno, H. Yoshioka, T. Gokan, H. Sawano). Further developments of this field were presented during the STC P meeting.

Furthermore the structure of the track meetings were discussed in detail during the STC P meetings. Overall the track structure is supported to improve the coordination between the STCs and to support the creation of new Collaborative Working Groups. The members of the STC P agreed, that to achieve this goal sufficient time for discussions need to be given during the track meetings. Keynotes should stay with the STC with the option of joint keynotes between the STCs.

Albert Weckenmann