precision measurement, optical sensor, motion control
JAPAN
CHINA
STC P, STC S
Primary STC of interest: P
No
Professor
Professor
Tohoku University
+81-22-795-6951
Nano-Metrology and Control Laboratory,
Center for Precision Nanosystems.
Department of Nanomechanics, Tohoku University, Aramaki Aza Aoba 6-6-01, Aoba-ku